Використання халькогенідних склоподібних напівпровідників для створення мікро- та нанорозмірних структур
DOI:
https://doi.org/10.35681/1560-9189.2020.22.2.211249Ключові слова:
наноструктури, халькогенідні склоподібні напівпровідники, неорганічні резисти, плазмони, ближнє полеАнотація
Представлено результати аналізу методів формування мікро- та нанорозмірних елементів на тонких плівках халькогенідних склоподібних напівпровідників, що базуються на численних експериментальних даних, і визначено можливості їхнього застосування для створення оптичних дифракційних елементів.
Посилання
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