Удосконалення сенсорів з призмовим типом збудження поверхневого плазмонного резонансу на полімерній основі
DOI:
https://doi.org/10.35681/1560-9189.2019.21.3.183437Ключові слова:
поверхневий плазмонний резонанс, пластикова підкладка, гаряче пресування, низькотемпературний відпал, біметалеві плівки, дисковий форматАнотація
Розглянуто шляхи поліпшення експлуатаційних характеристик (зниження вартості, підвищення чутливості та продуктивності) сенсорних приладів на основі призмового збудження поверхневого плазмонного резонансу (ППР) в конфігурації Кретчмана та скануванні кута падіння монохроматичного світла при застосуванні пластикової підкладки. Запропоновано удосконалену технологію виготовлення чутливого елемента ППР, яка включає гаряче пресування полімерної підкладки та модифікацію властивостей активного металевого покриття за рахунок низькотемпературного відпалу плівки Au або застосування біметалевої структури Ag/Au, що поєднує переваги обох шарів, а також конструкцію дискового варіанта сенсора на основі плоского інтегрованого чипа з голографічними ґратками для вводу-виводу світла.
Посилання
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